The CANEUS 2006 short course consists of four modules - pay one price and attend all four modules or attend only the modules that interest you. The short course will be offered on Sunday, August 27, 2006. Each module is about 90 minutes in duration.

Module 1: From Concept to Commercialization, Dr. Amish Desai, Tanner Research Inc.

Objective To help participants understand the key issues and challenges in transitioning proposal concepts into mil-std prototypes. We will share Tanner Research's best practices and lessons learned, and will discuss the economics of Tanner's MEMS foundry. Description One technology application area cannot sustain an R&D effort by itself. To keep R&D going, engineering and marketing groups must propagate key technology for various application areas. For almost 20 years, Tanner Research has sustained development and expansion of its advanced CAD tool, the L-Edit suite, and raised funds for micro-nano-technology (MNT) research. Tanner Research has faced distinct challenges in each stage of MNT research, including concept design, proposal, initial research (and marketing) to obtain Phase II funding, re-design, process development, fabrication (in-house and external), and application specific marketing for Phase III funds. Each of these stages has required different resources and skills-and sometimes, the research has shown that MNT technology may not be the optimal solution! This course will examine the case study of Tanner Labs Foundry as a practical "how-to" for successfully going from concept to commercialization. We'll highlight examples and lessons learned from Tanner's L-edit layout tool and current Tanner Labs research, and we'll study challenges from current micro thruster research. Who Should Attend Program managers; business development; engineering researchers; small business personnel. What You Will Learn Common challenges in transitioning laboratory prototypes into mil-std qualified systems and components. The economics of a small-volume foundry business. How to survive the cyclical nature of the MNT industry by using innovative government R&D grants and nurturing a small-volume customer-specific MNT foundry. How to make the most of Small Business Initial Research (SBIR) grants, particularly in transitioning to Phase III funding. The benefits of vertical integration-for example, the synergy created between Tanner's L-Edit MEMS design software and a rapid prototyping MEMS fabrication facility. How unique experience in micro-energetics has yielded additional benefits and created a knowledge base from which to address the fabrication and integration of MNTs with energetics. A real-life example of how a DARPA grant was used to advance the specific impulse of miniature thrusters. The 18-month effort uncovered some high specific impulse chemical thrusters-as well as fundamental limitations of small-volume combustion. Course Handouts Course materials will be available electronically, upon request, after the conference. Instructor Amish Desai, MEMS Product Development Manager at Tanner Research, is currently working with micro thrusters, large displacement MEMS actuators, microfluidic technology, and polymer device packaging. He is also responsible for setting up a $2 million fabrication facility for the company. Before joining Tanner Research, Dr. Desai worked for Rockwell Scientific, where he was involved in the development of MEMS RF switch technology. Dr. Desai received a B.S. in Aerospace Engineering from UCLA and a Ph.D. in Electrical Engineering from California Institute of Technology. His research at Caltech focused on micro-machined active filters for airborne particle detection, fast mixers for protein folding studies, and micro-nozzles for electro-spray ionization mass spectroscopy. He holds four U.S. patents in micromachining and other areas and has authored articles in several trade publications on the topics of MEMS layout and design. About Tanner Research, Inc. Primarily started with a DARPA grant in the late 1980's, Tanner Research now provides electronic design automation (EDA) software tools for over 25,000 users worldwide, and advanced technology research with focus areas in image processing and MEMS energetics. Tanner Research's customers include the Jet Propulsion Laboratory, Microsoft, IBM, Intel, NEC, Ricoh Company, Xerox, British Aerospace, the U.S. Department of Defense, and CSR plc, just to name a few. Its tools and resulting products are used in PCs, cell phones, imaging systems, peripherals, and other applications. For example, a designer at JPL used Tanner tools to design the seven imagers used on Mars Rovers.

Module 2: MEMS and Nano Technologies for Space, Nico de Rooij, University of Neuchâtel

Objective To define MEMS and nano-technology and review the programmatic challenges in development by presenting design approaches and manufacturing methods as well as practical examples of devices currently under development. In addition, this course will present a system implementation approach on a real spacecraft, practical design examples and hardware demonstrations. Instructor Nico de Rooij, University of Neuchâtel

Module 3: Reliability of MEMS and NEMS, Ingrid De Wolf, PhD, IMEC, Group leader Reliability and Modelling (REMO)

Objective To present the existing know-how on reliability issues in MEMS, NEMS and their 0-level package, and to describe future challenges. Description After a general introduction on reliability, failure analysis and FMEA, a number of examples of failure mechanisms will be addressed. Many examples are taken from RF-MEMS switches and resonators, but they are not limited to this, as examples from MOEMS, pressure sensors, accelerometers, specific test structures, etc. will be shown as well. Issues such as stiction (capillary, charging induced, microwelding), deformation (T-effects, creep), fatigue, fracture, delamination, environmental effects (pressure, particles, humidity, gasses…), electromigration, self-actuation, electrical breakdown etc. are introduced using examples and their failure mechanism, failure defect, failure mode and failure cause will be explained. Dedicated instrumentation for reliability testing (optical monitoring, vacuum chambers, etc.) and for failure analysis (opening of a package, FIB, IR, LIVA, profilometry, etc.) will also be described. Who Should Attend Researchers to MEMS reliability engineers will benefit from this module. Instructor Ingrid De Wolf received her MS degree in Physics and her PhD in Sciences, Physics, both from the "Katholieke Universiteit Leuven, Belgium." In September 1989, she joined the Reliability group of the Interuniversity MicroElectronics Center (IMEC). She worked in the field of reliability physics of semiconductor devices, with special attention on mechanical stress aspects and failure analysis. Since 1999, she has headed the group REMO (Reliability and Modelling), where research is focused on Reliability and Modeling of MEMS (with focus on RF-MEMS), MEMS-packaging and IC-packaging. Microfabrication Technologies, Professor Hans Zappe, Laboratory for Micro-optics, Department of Microsystems Engineering - IMTEK, University of Freiburg, Germany Objective Microfabrication techniques, well established for decades in the realm of microelectronics, have now developed to the point where micro-mechanical, micro-optical, micro-fluidic ormicro-pneumatic structures may easily be manufactured; micrometer-scale features and nanometer-scale accuracy have become routine. Essential for evaluating the relevance ofmicrofabrication techniques when applied to new applications is understanding thecapabilities of the technology itself, as well as its limitations. In this module, we will provide an overview of microfabrication technology for researchers and engineers new to thefield. Beginning with a brief summary of photolithography, wet and dry etching, thin filmdeposition and metallization, we will also discuss specialized processes such as epitaxy, replication by hot embossing or injection molding and micro-contact printing. The mostimportant microsystems materials, including silicon, polymers and ceramics, will bepresented and their relative merits outlined. We will conclude with a few process examples, particularly from the realm of optical MEMS, and present a few of the foundry optionsavailable for prospective users without access to their own fabrication line.

Module 4: ITAR - Inter-Governmental Agreements, Flight Opportunities, Standards, Export policy restrictions, Environmental, Safety

Objective Fundamental concepts of international trade controls on nano-technology and a framework to determine if U.S. government approval is required will be covered. The module will also explain basic administrative requirements for complying with regulations, and ramifications and penalties for noncompliance. Instructors US State Department, European Commission, Foreign Affairs Canadam, Director of ITAR for Ministry of Industry Canada